Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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The electro discharge machining (EDM), one of the methods used in the machining industry and a non-traditional manufacturing method, the electro erosion process does not depend on the hardness of material and offers a way to process materials of very complex geometry with very fine and high precision by using cheap electrode materials, which make it a preferred method. In this study, effect of ...
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Surface quality including surface roughness and edge chipping is a key process measure in micro ultrasonic machining (Micro-USM) as an efficient process for micromachining of hard and brittle materials. Process parameters such as ultrasonic vibration amplitude, static load, type of tool material, type and size of abrasive particles and slurry concentration can influence the surface quality. How...
متن کاملExperimental Investigation of the Effect of Deionized Water on Surface Roughness of Near Dry Electro Discharge Machining of AISI D2 Steel
The electro discharge machining (EDM), one of the methods used in the machining industry and a non-traditional manufacturing method, the electro erosion process does not depend on the hardness of material and offers a way to process materials of very complex geometry with very fine and high precision by using cheap electrode materials, which make it a preferred method. In this study, effect of ...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2013
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/53/1/012090